| Course Unit Code | 450-4010/01 |
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| Number of ECTS Credits Allocated | 5 ECTS credits |
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| Type of Course Unit * | Optional |
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| Level of Course Unit * | Second Cycle |
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| Year of Study * | First Year |
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| Semester when the Course Unit is delivered | Winter Semester |
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| Mode of Delivery | Face-to-face |
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| Language of Instruction | Czech |
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| Prerequisites and Co-Requisites | There are no prerequisites or co-requisites for this course unit |
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| Name of Lecturer(s) | Personal ID | Name |
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| HOR02 | doc. Ing. Bohumil Horák, Ph.D. |
| Summary |
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Microelectronic sensors are characterized as sensors using phenomena in semiconductors and layer structures made microelectronic technologies. They represent a progressive, worldwide dynamic growth number of types of sensors, known as sensors 2.generation.This type of sensor is compatible with integrated circuits in terms of both technological as well as the perimeter, which make full use of opportunities provided by microelectronics (higher reliability, lower price for smaller dimensions and weight, new circuit innovative solutions and applications).
The course is devoted to areas:
- Basic principles, features and design solutions microelectronic sensors (MS)
- Manufacturing processes used in the manufacture of MS.
- MS in industry, medicine and environmental protection |
| Learning Outcomes of the Course Unit |
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Students will be acquainted with this promising group microelectronic components - microelectronic sensors and their application in measuring non-electrical quantities, enabling them to focus on the issue of automatic acquisition of initial information management systems in industry, medical engineering, robotics and navigation.
Students will be acquainted with this promising group microelectronic components - microelectronic sensors and their application in measuring non-electrical quantities. |
| Course Contents |
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Lectures:
Microelectronic sensors definitions. Comparison of properties of conventional sensors and microelectronic sensors . The role of technology in manufacturing process developing of senzors. Production steps in manufacturing od microelectronic sensors.
Planar technology and its use in the manufacture of microelectronic sensors. Micromechanics. Mechanical processing of materials compatible with microelectronic processes of microelekctronic elements production. Micromechanical structures and their use in the construction of microelectronic sensors.
Microelectronic sensors of mechanical signals. Microelectronic pressure sensors and accelerometers.
Microelectronic sensors of thermal quantities. Semiconductor temperature sensors. Microelectronic Thermoblocks. The use of microelectronic sensors for measuring quantities of heat flow, vacuum and IR radiation.
Microelectronic sensors magnetic properties. Integrated magnetic Hall sensors. Magnetorezistors. Magnetodiods and magnetotranzistors. Microelectronic sensors using pellet domain phenomenon
Microelectronic sensors of radiation signals. Non-ionizing radiation detectors. Spectral characteristics of photoelectric sensors and its possible influence. Photoconductive and photovoltaic effect and its use in construction of microlektronic sensors. Avalanche photodiodes, PIN diodes and their characteristics. Photoelectric position sensor-PSD.
Image sensors. Image sensors of visible radiation.
X-Y-addressed sensors. CCD image sensor with line transmission. CCD image sensor with image transmission.
Microelectronic thermal systems. CCD infrared systems with pyroelectric detectors. CCD quant thermal systems.
Radiation. Silicium ionizing detectors and germanium detectors. Transients and Surface Barrier detectors. Anular position sensitive detectors. Transmission detectors. Microstrip detectors and their use for measuring for measuring high-energy particles.
Microelectronic sensors of chemical properties. Sensors type ChemFET, IS FET. Chemoresistors. Chemical sensors using surface acoustic wave (SAW. detectors of hmidityi. Integrated oxygen sensors. Biosensors.
Processing of sensor signals. Multisensor array. SMART sensors.
Microelectronic Sensor Applications in industry (automotive, robotics, etc.).
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| Recommended or Required Reading |
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| Required Reading: |
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Fraden J.: Handbook of Modern Sensors,Springer -Verlag, Inc., 2004, ISBN 0-387-00750-4
Janata J., Huber R.J.: Solid State Senzors,Academic Press,Inc.1985.
Middelhoek S., Audet S.: Silicon Sensors,Academic Press,Inc.1989.
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Horák, B.,J.Kazárik, T.Otáhalová, O.Balak a K.Friedrischková. Mikrosnímače a speciální měření, učební text a návody do cvičení. VŠB-TU Ostrava, 2012.
Husák M.: Senzorové systémy , skriptum ČVUT Praha 1993
Guldan, A.: Mikroelektronické senzory. Bratislava, Alfa 1988. |
| Recommended Reading: |
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Ristic L.,Senzor technology and Devices, Artech House, Boston,London, 1994,ISBN 0-89006-532-2
Randy F.:Understanding smart sensors,Artech House, Boston,London,1996, ISBN 0-89006-824-0 |
| Hutyra,M.:Mikrosnímače a speciální měření. Sylaby na WWW stránkách katedry,2005 |
| Planned learning activities and teaching methods |
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| Lectures, Individual consultations, Experimental work in labs, Project work |
| Assesment methods and criteria |
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| Task Title | Task Type | Maximum Number of Points
(Act. for Subtasks) | Minimum Number of Points for Task Passing |
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| Exercises evaluation and Examination | Credit and Examination | 100 (100) | 51 |
| Exercises evaluation | Credit | 30 | 15 |
| Examination | Examination | 70 | 1 |