Lectures:
Basic ideas an terminology. Measurement system. Mathematical and physical model of sensor. Information transfer by sesor. Characteristics of sensor.
MS for mechanical signals. Presure sensors and accelerometers.
MS for thermal signal. Semiconductor temperature sensors. Microelectronic thermopiles. Application of microelectronic thermal sensors on flow, vacuum and IR radiation measurement.
MS for magnetic signals.
MS for radiant signals. Application for visible light.
Solid-state. Imaging sensors.
MS for nunclear-particle radiation
MS for chamical signals. Gas sensors. Humidity sensors.
MS technology. Planar technology.
Micromachining technology - compatibile technologies with IC technology. Micromechanical structures and their utilization on MS design.
Processing of MS signals. Multi-sensors arrays. SMART sensors.
Application of MS in industry (robotics,)
Application of MS in medical (measurement outside and inside of human body)
Application of MS in enviroment protection.
Laboratories:
Introductory session. Organisation of laboratory exercises. Safety in laboratory.
LE1. Semiconductor temperature sensors.
LE2. Semiconductor presure sensors.
LE3. Hall effect magnetic sensors.
Discusion of LE1,LE2,LE3 results and achievements.
LE4. Monolytic accelerometer ADXL50.
LE5. Dynamical properties of semiconductor radiant sensor.
LE6. Noncontact current sensors ased upon Hall plate.
Discuccion of LE4,LE5,LE6 results and achievements.
LE7. Semiconductor temperature sensor with PWM output.
LE8. Semiconductor imaging sensors.
LE9. Photoelectric possition sensitive devices (PSD).
LE10. Gass sensors.
Final session.
Basic ideas an terminology. Measurement system. Mathematical and physical model of sensor. Information transfer by sesor. Characteristics of sensor.
MS for mechanical signals. Presure sensors and accelerometers.
MS for thermal signal. Semiconductor temperature sensors. Microelectronic thermopiles. Application of microelectronic thermal sensors on flow, vacuum and IR radiation measurement.
MS for magnetic signals.
MS for radiant signals. Application for visible light.
Solid-state. Imaging sensors.
MS for nunclear-particle radiation
MS for chamical signals. Gas sensors. Humidity sensors.
MS technology. Planar technology.
Micromachining technology - compatibile technologies with IC technology. Micromechanical structures and their utilization on MS design.
Processing of MS signals. Multi-sensors arrays. SMART sensors.
Application of MS in industry (robotics,)
Application of MS in medical (measurement outside and inside of human body)
Application of MS in enviroment protection.
Laboratories:
Introductory session. Organisation of laboratory exercises. Safety in laboratory.
LE1. Semiconductor temperature sensors.
LE2. Semiconductor presure sensors.
LE3. Hall effect magnetic sensors.
Discusion of LE1,LE2,LE3 results and achievements.
LE4. Monolytic accelerometer ADXL50.
LE5. Dynamical properties of semiconductor radiant sensor.
LE6. Noncontact current sensors ased upon Hall plate.
Discuccion of LE4,LE5,LE6 results and achievements.
LE7. Semiconductor temperature sensor with PWM output.
LE8. Semiconductor imaging sensors.
LE9. Photoelectric possition sensitive devices (PSD).
LE10. Gass sensors.
Final session.