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Terminated in academic year 2009/2010

Manufacturing of Microelectronic Devices

Type of study Doctoral
Language of instruction Czech
Code 455-0901/01
Abbreviation VMP
Course title Manufacturing of Microelectronic Devices
Credits 0
Coordinating department Department of Measurement and Control
Course coordinator doc. Ing. Milan Hutyra, CSc.

Subject syllabus

Lectures:
Materials used for manufacturing of microelectronic devices, clean room. Silicon single/crystal grouth and wafering.

Basics of solid state technology. Physical and chemical methods for preparation of thin film layers .Epitaxial growth.
Introduction of dopants into silicon. Thermal diffusion and ion implantation.
Method for processing of layers. Lithography. Chemical etching. Dry etching.
Assembly of microelectronic devices. Testing and reliability programs. Diagnostic methods in semiconductor device manufacturing.
Technology of bipolar and unipolar ICs. Planar technology. Isoplanar, I2L, CMOS, BiCMOS.
Microtechnology as the technology for microelectronic sensor manufacturing. Micromaschining.

Literature

VLSI Technology-edited by S.M.Sze,McGraw-Hill Book Comp.1983
A.S.Grove :Physics and Technology of Semiconductor Devices, John Wiley and Sons Inc. 1967

Advised literature

S.Wolf, R.N.Tauber : Silicon Processing for VLSI ERA -Process technology, , Lattice Press 1990
Bipolar technology, CD training material of TESLA SEZAM
Fromsilica to silicon, CD training material of TESLA SEZAM