Lectures:
Basic ideas and terminology. Mathematical and physical model of sensor. Characteristics of sensors. MS - their preferences and limitation.
Microtechnology. IC technology, micromaschining.
MS for machanical signals.Silicon pressure senosrs and accelerometers. Temperature compensation of pressure MS, method of trimming. Design of MS for mechanical signals.
MS for thermal signals. Semiconductor temperature sensors. Thermoanemometers. Thermal feedback in microstructures and their utilization in MS design.
MS for radiant signal, solid state imaging sensors. MS for nuclear - pacticle radiation.
MS for chemical sensor. Semiconductor gas sensors. Chemicaly sensitive semiconductor devices CHEMFET, ISFET.
Processing of sensor signals. Application of MS in industry automotive, and environment protection.
Basic ideas and terminology. Mathematical and physical model of sensor. Characteristics of sensors. MS - their preferences and limitation.
Microtechnology. IC technology, micromaschining.
MS for machanical signals.Silicon pressure senosrs and accelerometers. Temperature compensation of pressure MS, method of trimming. Design of MS for mechanical signals.
MS for thermal signals. Semiconductor temperature sensors. Thermoanemometers. Thermal feedback in microstructures and their utilization in MS design.
MS for radiant signal, solid state imaging sensors. MS for nuclear - pacticle radiation.
MS for chemical sensor. Semiconductor gas sensors. Chemicaly sensitive semiconductor devices CHEMFET, ISFET.
Processing of sensor signals. Application of MS in industry automotive, and environment protection.