Terminated in academic year 2009/2010

Special Microelectronic Sensors

Type of study	Doctoral
Language of instruction	Czech
Code	455-0923/01
Abbreviation	SMES
Course title	Special Microelectronic Sensors
Credits	0
Coordinating department	Department of Measurement and Control
Course coordinator	prof. Ing. Petr Bilík, Ph.D.

Subject syllabus

Lectures:
Sensor as the primary source of information in measurement and control systems. Signal conversion in sensors.Clasification of sensors. The role of sensor in measurement and control systems.
Microtechnology.Chemical and physical method for thin film preparation. Thermal diffusion and ion implantation. Lithography. Etching of layers. Planar technology. Micromaschining.
Microelectronic sensors (MS). MS sensor for mechanical, thermal, radiant, magnetic and chemical signals.
Processing of signal from sensors. Getting sensor information into MCU. Technique and system consideration. Linearization. Compensation.
Smart sensors. Using MCUs/DSPs to increase Sensor IQ.
Communication for Smart Sensors. Communication protocols. Industrial and sensor networks.

Literature

MAY, G.S. Fundamentals of Semiconductor Fabrication. New York : Willey, 2007. 320 s. .

HUSÁK, M. Mikrosenzory a mikroaktuátory. Praha : Academia, 2008. 544 s. ISBN: 978-80-200-1478-8

Advised literature

SZE, S.M. Semiconductor Sensors. New York : Willey, 1994. 576 s.

RANDY F. Understanding smart sensors. Boston, London : Artech House, 1996. 400 s.

RISTIC, L. Sensor technology and Devices. Boston, London : Artech House, 1994. 524 s. ISBN 0-89006-532-2

GULDAN, A. Mikroelektronické senzory. Bratislava : Alfa, 1987.

ZEHNULA, K. Čidla robotů. Praha : SNTL, 1990.

back to search page