MAY, G.S. Fundamentals of Semiconductor Fabrication. New York : Willey, 2007. 320 s. ISBN: 978-0-471-23279-7 .
HUSÁK, M. Mikrosenzory a mikroaktuátory. Praha : Academia, 2008. 544 s. ISBN: 978-80-200-1478-8
Terminated in academic year 2009/2010
Special Microelectronic Sensors
| Type of study | Doctoral |
|---|---|
| Language of instruction | Czech |
| Code | 455-0923/01 |
| Abbreviation | SMES |
| Course title | Special Microelectronic Sensors |
| Credits | 0 |
| Coordinating department | Department of Measurement and Control |
| Course coordinator | prof. Ing. Petr Bilík, Ph.D. |
Subject syllabus
Lectures:
Sensor as the primary source of information in measurement and control systems. Signal conversion in sensors.Clasification of sensors. The role of sensor in measurement and control systems.
Microtechnology.Chemical and physical method for thin film preparation. Thermal diffusion and ion implantation. Lithography. Etching of layers. Planar technology. Micromaschining.
Microelectronic sensors (MS). MS sensor for mechanical, thermal, radiant, magnetic and chemical signals.
Processing of signal from sensors. Getting sensor information into MCU. Technique and system consideration. Linearization. Compensation.
Smart sensors. Using MCUs/DSPs to increase Sensor IQ.
Communication for Smart Sensors. Communication protocols. Industrial and sensor networks.
Sensor as the primary source of information in measurement and control systems. Signal conversion in sensors.Clasification of sensors. The role of sensor in measurement and control systems.
Microtechnology.Chemical and physical method for thin film preparation. Thermal diffusion and ion implantation. Lithography. Etching of layers. Planar technology. Micromaschining.
Microelectronic sensors (MS). MS sensor for mechanical, thermal, radiant, magnetic and chemical signals.
Processing of signal from sensors. Getting sensor information into MCU. Technique and system consideration. Linearization. Compensation.
Smart sensors. Using MCUs/DSPs to increase Sensor IQ.
Communication for Smart Sensors. Communication protocols. Industrial and sensor networks.
Literature
Advised literature
SZE, S.M. Semiconductor Sensors. New York : Willey, 1994. 576 s. ISBN: 978-0-471-54609-2
RANDY F. Understanding smart sensors. Boston, London : Artech House, 1996. 400 s. ISBN 0-89006-824-0
RISTIC, L. Sensor technology and Devices. Boston, London : Artech House, 1994. 524 s. ISBN 0-89006-532-2
GULDAN, A. Mikroelektronické senzory. Bratislava : Alfa, 1987.
ZEHNULA, K. Čidla robotů. Praha : SNTL, 1990.
RANDY F. Understanding smart sensors. Boston, London : Artech House, 1996. 400 s. ISBN 0-89006-824-0
RISTIC, L. Sensor technology and Devices. Boston, London : Artech House, 1994. 524 s. ISBN 0-89006-532-2
GULDAN, A. Mikroelektronické senzory. Bratislava : Alfa, 1987.
ZEHNULA, K. Čidla robotů. Praha : SNTL, 1990.