Nanotechnology I – Thin Films

Type of study	Bachelor
Language of instruction	Czech
Code	653-2042/01
Abbreviation	Nano I
Course title	Nanotechnology I – Thin Films
Credits	4
Coordinating department	Department of Materials Engineering and Recycling
Course coordinator	doc. Dr. Mgr. Kamil Postava

Subject syllabus

1. Introduction to thin films as one-dimensional nanostructures
2. Vacuum systems used for preparation of thin films, requirements of reduced pressure, vacuum technology
3. Physical vapor deposition, evaporation, sputtering
4. Chemical methods for thin-film deposition, chemical vapor deposition, electrodeposition, atomic layer deposition
5. Growth mechanism of thin films, growth of self-assembled nanostructures, epitaxy
6. Summary of methods for determination of thickness, composition, and structure of thin films
7. Optics of thin films, introduction to interference phenomena
8. Application of optical thin films, , interference filters, antrireflection coating, 1D photonic crystals
9. Electric properties of thin films, measurement of thin film conductivity
10. Application of thin films in microelectronics, effects o interfaces
11. Introduction to magnetic properties of thin films
12. Application of magnetic thin films, magnetic recording and data storage

Literature

OHRING, M., The material science of thin films, Academic Press, 1992.
MACLEOD, H. A.: Thin-film optical filters, 2nd ed. Bristol, 1986.
YEH, P.: Optical waves in layered media, Willey, New York 1988.

Advised literature

LUTH, H., Solid surfaces, interfaces and thin films, Springer, Berlin 2001.
AZZAM, R. M. A., BASHARA, N. M.: Ellipsometry and polarized light, North-Holland, Amsterdam, 1977.

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