Microsensors and Special Measurement
| Type of study | Follow-up Master |
|---|---|
| Language of instruction | English |
| Code | 450-4010/02 |
| Abbreviation | MSM |
| Course title | Microsensors and Special Measurement |
| Credits | 5 |
| Coordinating department | Department of Cybernetics and Biomedical Engineering |
| Course coordinator | Ing. David Vala, Ph.D. |
Subject syllabus
Lectures:
Microelectronic sensors definitions. Comparison of properties of conventional sensors and microelectronic sensors . The role of technology in manufacturing process developing of senzors. Production steps in manufacturing od microelectronic sensors.
Planar technology and its use in the manufacture of microelectronic sensors. Micromechanics. Mechanical processing of materials compatible with microelectronic processes of microelekctronic elements production. Micromechanical structures and their use in the construction of microelectronic sensors.
Microelectronic sensors of mechanical signals. Microelectronic pressure sensors and accelerometers.
Microelectronic sensors of thermal quantities. Semiconductor temperature sensors. Microelectronic Thermoblocks. The use of microelectronic sensors for measuring quantities of heat flow, vacuum and IR radiation.
Microelectronic sensors magnetic properties. Integrated magnetic Hall sensors. Magnetorezistors. Magnetodiods and magnetotranzistors. Microelectronic sensors using pellet domain phenomenon
Microelectronic sensors of radiation signals. Non-ionizing radiation detectors. Spectral characteristics of photoelectric sensors and its possible influence. Photoconductive and photovoltaic effect and its use in construction of microlektronic sensors. Avalanche photodiodes, PIN diodes and their characteristics. Photoelectric position sensor-PSD.
Image sensors. Image sensors of visible radiation.
X-Y-addressed sensors. CCD image sensor with line transmission. CCD image sensor with image transmission.
Microelectronic thermal systems. CCD infrared systems with pyroelectric detectors. CCD quant thermal systems.
Radiation. Silicium ionizing detectors and germanium detectors. Transients and Surface Barrier detectors. Anular position sensitive detectors. Transmission detectors. Microstrip detectors and their use for measuring for measuring high-energy particles.
Microelectronic sensors of chemical properties. Sensors type ChemFET, IS FET. Chemoresistors. Chemical sensors using surface acoustic wave (SAW. detectors of hmidityi. Integrated oxygen sensors. Biosensors.
Processing of sensor signals. Multisensor array. SMART sensors.
Microelectronic Sensor Applications in industry (automotive, robotics, etc.).
Microelectronic sensors definitions. Comparison of properties of conventional sensors and microelectronic sensors . The role of technology in manufacturing process developing of senzors. Production steps in manufacturing od microelectronic sensors.
Planar technology and its use in the manufacture of microelectronic sensors. Micromechanics. Mechanical processing of materials compatible with microelectronic processes of microelekctronic elements production. Micromechanical structures and their use in the construction of microelectronic sensors.
Microelectronic sensors of mechanical signals. Microelectronic pressure sensors and accelerometers.
Microelectronic sensors of thermal quantities. Semiconductor temperature sensors. Microelectronic Thermoblocks. The use of microelectronic sensors for measuring quantities of heat flow, vacuum and IR radiation.
Microelectronic sensors magnetic properties. Integrated magnetic Hall sensors. Magnetorezistors. Magnetodiods and magnetotranzistors. Microelectronic sensors using pellet domain phenomenon
Microelectronic sensors of radiation signals. Non-ionizing radiation detectors. Spectral characteristics of photoelectric sensors and its possible influence. Photoconductive and photovoltaic effect and its use in construction of microlektronic sensors. Avalanche photodiodes, PIN diodes and their characteristics. Photoelectric position sensor-PSD.
Image sensors. Image sensors of visible radiation.
X-Y-addressed sensors. CCD image sensor with line transmission. CCD image sensor with image transmission.
Microelectronic thermal systems. CCD infrared systems with pyroelectric detectors. CCD quant thermal systems.
Radiation. Silicium ionizing detectors and germanium detectors. Transients and Surface Barrier detectors. Anular position sensitive detectors. Transmission detectors. Microstrip detectors and their use for measuring for measuring high-energy particles.
Microelectronic sensors of chemical properties. Sensors type ChemFET, IS FET. Chemoresistors. Chemical sensors using surface acoustic wave (SAW. detectors of hmidityi. Integrated oxygen sensors. Biosensors.
Processing of sensor signals. Multisensor array. SMART sensors.
Microelectronic Sensor Applications in industry (automotive, robotics, etc.).
E-learning
Materials are available at https://lms.vsb.cz/?lang=en
Literature
Fraden J.: Handbook of Modern Sensors,Springer -Verlag, Inc., 2004, ISBN 0-387-00750-4
Janata J., Huber R.J.: Solid State Senzors,Academic Press,Inc.1985.
Middelhoek S., Audet S.: Silicon Sensors,Academic Press,Inc.1989.
Janata J., Huber R.J.: Solid State Senzors,Academic Press,Inc.1985.
Middelhoek S., Audet S.: Silicon Sensors,Academic Press,Inc.1989.
Advised literature
Ristic L.,Senzor technology and Devices, Artech House, Boston,London, 1994,ISBN 0-89006-532-2
Randy F.:Understanding smart sensors,Artech House, Boston,London,1996, ISBN 0-89006-824-0
Randy F.:Understanding smart sensors,Artech House, Boston,London,1996, ISBN 0-89006-824-0