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Microsensors and Special Measurement

Anotace

Microelectronic sensors are characterized as sensors using phenomena in semiconductors and layer structures made microelectronic technologies. They represent a progressive, worldwide dynamic growth number of types of sensors, known as sensors 2.generation.This type of sensor is compatible with integrated circuits in terms of both technological as well as the perimeter, which make full use of opportunities provided by microelectronics (higher reliability, lower price for smaller dimensions and weight, new circuit innovative solutions and applications).
The course is devoted to areas:
- Basic principles, features and design solutions microelectronic sensors (MS)
- Manufacturing processes used in the manufacture of MS.
- MS in industry, medicine and environmental protection

Povinná literatura

Fraden J.: Handbook of Modern Sensors,Springer -Verlag, Inc., 2004, ISBN 0-387-00750-4
Janata J., Huber R.J.: Solid State Senzors,Academic Press,Inc.1985.
Middelhoek S., Audet S.: Silicon Sensors,Academic Press,Inc.1989.

Doporučená literatura

Ristic L.,Senzor technology and Devices, Artech House, Boston,London, 1994,ISBN 0-89006-532-2
Randy F.:Understanding smart sensors,Artech House, Boston,London,1996, ISBN 0-89006-824-0 


Language of instruction čeština, angličtina
Code 450-4010
Abbreviation MSM
Course title Microsensors and Special Measurement
Coordinating department Department of Cybernetics and Biomedical Engineering
Course coordinator Ing. David Vala, Ph.D.