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Special Microelectronic Sensors

Type of study Doctoral
Language of instruction English
Code 450-6004/02
Abbreviation SMES
Course title Special Microelectronic Sensors
Credits 10
Coordinating department Department of Cybernetics and Biomedical Engineering
Course coordinator doc. Ing. Bohumil Horák, Ph.D.

Subject syllabus

Lectures:

Sensor as the primary source of information in measurement and control systems. Signal conversion in sensors. Classification of sensors. The role of sensor in measurement and control systems.
Microtechnology. Chemical and physical method for thin film preparation. Thermal diffusion and ion implantation. Lithography. Etching of layers. Planar technology. Micromachining.
Microelectronic sensors (MS). MS sensor for mechanical, thermal, radiant, magnetic and chemical signals.
Processing of signal from sensors. Getting sensor information into MCU. Technique and system consideration. Linearization. Compensation.
Smart sensors. Using MCUs/DSPs to increase Sensor IQ.
Communication for Smart Sensors. Communication protocols. Industrial and sensor networks.

Literature

Minin, O.: Microsensors. IntechOpen, 2011 ISBN: 978-953-307-170-1 

Advised literature

FRADEN, Jacob. Handbook of modern sensors: physics, designs, and applications. 4th ed. New York: Springer, 2010, xv, 663 s. ISBN 978-1-4419-6465-6 .

LURYI, Serge, Jimmy XU a Alex ZASLAVSKY. Future trends in microelectronics: from nanophotonics to sensors and energy. Hoboken, N.J.: John Wiley, 2010, 431 p. ISBN 0470551372 .