Microelectronic sensor (MS) are characterized as sensor based upon phenomena which occur in the semiconductor and in the thin and thich films and are fabricated by microtechnology. They present the progresive dynamic developing type of sensor called as "the second generation sensor". This kind of sensors are compatibile with integrated circuit not only form the point of view of technology but of design that enable fully to utilize the possibilities opered by microelectronic (higher reliolility excelent performance, price ,new design solutions and nontraditional application). The subject is dedicated to the areas: Basic physical principles of MS properties and design of MS, MS technology and application of MS industry, medical and enviroment protection.
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LURYI, Serge, Jimmy XU a Alex ZASLAVSKY. Future trends in microelectronics: from nanophotonics to sensors and energy. Hoboken, N.J.: John Wiley, 2010, 431 p. ISBN 0470551372.