Within this application subject knowledge of optics will be further developed and deepened to provide an overview of basics of optical diagnostics.
Literature
HARIHARAN, P. Basics of interferometry. 2nd ed. Burlington: Elsevier/Academic Press, 2007. ISBN 978-0-12-373589-8.
Advised literature
QUINTEN, Michael. A practical guide to optical metrology for thin films. John Wiley & Sons, 2012. ISBN 978-0-470-01608-4.
YOSHIZAWA, Toru (ed.). Handbook of optical metrology: principles and applications. Second edition. Boca Raton: CRC Press, Taylor & Francis Group, 2017. ISBN 978-1-4665-7359-8.