1. Introduction.
2. Measurement of refractive index and phase changes.
3. Photometry.
4. Optical microscopy.
5. Measurement of surface topography.
6. Measurement oflengths and their changes.
7. Measurement of velocity.
8. Determination of course of physical fields.
9. Spectroscopy.
GÅSVIK, Kjell J. Optical metrology. John Wiley & Sons, 2003. ISBN 978-0-470-85560-7.
HARIHARAN, P. Basics of interferometry. 2nd ed. Burlington: Elsevier/Academic Press, 2007. ISBN 978-0-12-373589-8.
Advised literature
QUINTEN, Michael. A practical guide to optical metrology for thin films. John Wiley & Sons, 2012. ISBN 978-0-470-01608-4.
YOSHIZAWA, Toru (ed.). Handbook of optical metrology: principles and applications. Second edition. Boca Raton: CRC Press, Taylor & Francis Group, 2017. ISBN 978-1-4665-7359-8.