Advanced Technologies of Nanostructures Preparation - Principles and Applications

Content focus:
- Introduction to physical technologies. Description and overview of selected
physical technologies. The use of physical technologies.
- Principles of physical technologies, technological and analytical equipment.
Principles of growth layers. Interaction of particles with matter (electrons, ions, neutral
particles photons). Electron beam sources, parameters and calculation of electron sources.
Ion sources, parameters and calculation of ion sources. Electron and
ion optical systems. Sources of atoms and molecules, parameters and calculation
ion sources. Plasma as a source of chemically active particles. Source photons
optical systems.
- Physical technologies. Deposition of thin films and coatings,
nanostructures (evaporation, MBE, CVD, PECVD, magnetron and ion sputtering,
direct ion deposition, laser ablation, etc.). Alloy (diffusion, ion
implantation). Lithography. Etching of surfaces, thin films and coatings
(chemical etching, plasma etching and ion).
- Analysis of surfaces, thin films and nanostructures - overview. use
individual methods (STM, AFM, TEM, SEM, AES, RBS, ISS, SIMS, XPS, LEED, RHEED,
etc.). New trends in advanced materials technologies.