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Terminated in academic year 2013/2014

Practice in Advanced Technologies

Type of study Follow-up Master
Language of instruction Czech
Code 516-0080/01
Abbreviation PPT
Course title Practice in Advanced Technologies
Credits 4
Coordinating department Institute of Physics
Course coordinator prof. Ing. Jaromír Pištora, CSc.

Subject syllabus

Laboratory work include:
- Work on individual projects focused on the calculation of optical systems
equipment for electron and ion beams - computer program
optical SIMION
- Special experimental exercises in the following areas: deposition of thin films
and coatings, etching the surfaces of nanostructures, thin films and coatings
analysis of surfaces, thin films and nanostructures

Literature

BRODIE, I. - MURAY, J. J.: The Physics of Micro/Nano-Fabrication, Plenum
Press, New York, 1992;
VÁLYI, L.: Atom and Ion Sources, John Wiley and Sons Ltd (March 1, 1978);
ECKERTOVÁ, L.: Physics of Thin Films, Plenum Press, New York, 1986;

Advised literature

FELDMAN, L. C., MAYER, J. W.: Fundamentals of Surface and Thin Film
Analysis, Elsevier Science Publishing Co., Inc., 1986;
RIVIERE, J. C.: Surface Analytical Techniques, Clarendon Press, Oxford, 1990.