Practice in Advanced Technologies

BRODIE, I. - MURAY, J. J.: The Physics of Micro/Nano-Fabrication, Plenum
Press, New York, 1992;
VÁLYI, L.: Atom and Ion Sources, John Wiley and Sons Ltd (March 1, 1978);
ECKERTOVÁ, L.: Physics of Thin Films, Plenum Press, New York, 1986;

FELDMAN, L. C., MAYER, J. W.: Fundamentals of Surface and Thin Film
Analysis, Elsevier Science Publishing Co., Inc., 1986;
RIVIERE, J. C.: Surface Analytical Techniques, Clarendon Press, Oxford, 1990.