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Metody přípravy nanostruktur a materiálů

Type of study Follow-up Master
Language of instruction Czech
Code 653-3171/01
Abbreviation MPNM
Course title Metody přípravy nanostruktur a materiálů
Credits 6
Coordinating department Department of Materials Engineering and Recycling
Course coordinator Ing. Lukáš Halagačka, Ph.D.

Subject syllabus

1. Methods for the preparation of thin films and nanostructured materials, conditions for the preparation of materials
2. Vacuum systems, plasma physics and chemical processes
3. Physical vapour deposition (PVD) methods
4. Chemical vapour deposition (CVD) for the preparation of epitaxial and nanostructured materials
5. Chemical vapour deposition in a plasma environment
6. Other derived CVD methods (MOCVD, LPCVD, ALD)
7. In-situ methods for monitoring material growth
8. Substrates and photoresists not only for semiconductor manufacturing, their production and properties
9. Lithography of advanced grayscale structures
10. Lift-off, wet-etching and dry-etching lithography methods
11. AFM, SEM, confocal microscopy characterization
12. MOSFET transistor masking lithography
13. State of the Art semiconductor lithography

Literature

GURNETT, Donald A.; BHATTACHARJEE, Amitava. Introduction to plasma physics: With space, laboratory and astrophysical applications. Cambridge University Press, 2017.
SLAVÍČEK, Pavel; ŠTĚPÁNOVÁ, Vlasta; KELAR, Jakub. Vakuová fyzika 1. 2016.
NEE, Andrew Yeh Ching. Handbook of manufacturing engineering and technology. Springer Publishing Company, Incorporated, 2014.

Advised literature

GLEITER, Herbert. Nanostructured materials: basic concepts and microstructure. Acta materialia, 2000, 48.1: 1-29.
MADKOUR, Loutfy H. Nanoelectronic materials: fundamentals and applications. Springer, 2019.