The subject is focused on methods of preparation of thin films by magnetron sputtering and chemical vapour deposition. It also deals with methods of monitoring the progress of layer growth, methods of preparation and characterization of nanostructures.
Literature
GURNETT, Donald A.; BHATTACHARJEE, Amitava. Introduction to plasma physics: With space, laboratory and astrophysical applications. Cambridge University Press, 2017.
SLAVÍČEK, Pavel; ŠTĚPÁNOVÁ, Vlasta; KELAR, Jakub. Vakuová fyzika 1. 2016.
NEE, Andrew Yeh Ching. Handbook of manufacturing engineering and technology. Springer Publishing Company, Incorporated, 2014.
Advised literature
GLEITER, Herbert. Nanostructured materials: basic concepts and microstructure. Acta materialia, 2000, 48.1: 1-29.
MADKOUR, Loutfy H. Nanoelectronic materials: fundamentals and applications. Springer, 2019.