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Metody přípravy nanostruktur a materiálů
| Language of instruction | angličtina, čeština |
|---|---|
| Code | 653-3171 |
| Abbreviation | MPNM |
| Course title | Metody přípravy nanostruktur a materiálů |
| Coordinating department | Department of Materials Engineering and Recycling |
| Course coordinator | Ing. Lukáš Halagačka, Ph.D. |
Summary
The subject is focused on methods of preparation of thin films by magnetron sputtering and chemical vapour deposition. It also deals with methods of monitoring the progress of layer growth, methods of preparation and characterization of nanostructures.
Literature
Advised literature
GLEITER, Herbert. Nanostructured materials: basic concepts and microstructure. Acta materialia, 2000, 48.1: 1-29.
MADKOUR, Loutfy H. Nanoelectronic materials: fundamentals and applications. Springer, 2019.
MADKOUR, Loutfy H. Nanoelectronic materials: fundamentals and applications. Springer, 2019.