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Pokročilé technologie přípravy nanostruktur I

Type of study Follow-up Master
Language of instruction English
Code 9360-0158/02
Abbreviation PTPI
Course title Pokročilé technologie přípravy nanostruktur I
Credits 4
Coordinating department CNT - Nanotechnology Centre
Course coordinator doc. Dr. Mgr. Kamil Postava

Subject syllabus

1. Introduction to preparation technologies, their scope and use in research and industry.
2. The principles of layer growth. Interaction of particles with solid materials (electrons, ions, neutral particles).
3. Used sources of electrons, ions, atoms, molecules, plasma, photons and their parameters. Elements for their manipulation and measurement.
4. Physical methods for the preparation of nanostructures (evaporation, DC, RF, reactive, magnetron and ion sputtering, pulsed laser deposition, evaporation with additional ion beam).
5. Chemical and combined methods of preparation (types of reactions used, thermal and organometal CVD processes, plasma and laser enhanced CVD, processes thermodynamics, gas transfer in deposition chambers, layer growth kinetics).
6. Lithographic processes, two-photon polymerization, alloying (ion implantation) and plasma etching.
7. Nucleation on substrate (capillary theory and atomic models). Layer growth modes. Reconstruction, material and electron structure of surfaces. Defects in monocrystalline growth. Methods for epitaxy (MBE, LPE, LEGO, MOVPE, ALE).
8. Analysis of surfaces, thin layers and nanostructures - Overview of in-situ and ex-situ methods. Usecases of individual methods (STM, AFM, TEM, SEM AES, RBS, ISS, SIMS, XPS, LEED, RHEED, etc.).
9. New trends in advanced methods for material preparations.

Literature

OHRING, M.: Materials Science of Thin Films. 2nd ed. San Diego: Academic Press, 2002, 794 s. ISBN 0125249756 .
OURA, K., LIFSHITS, V.G., SARANIN, A., ZOTOV, A.V., KATAYAMA, M.: Surface Science: An Introduction. New York: Springer, 2003, 440 s. ISBN 3540005455.
KITTEL, C.: Introduction to Solid State Physics. 8th ed. Hoboken, NJ: Wiley, c2005. ISBN 047141526x .

Advised literature

BRODIE, I., MURAY, J. J.: The Physics of Micro/Nano-Fabrication. Plenum Press, New York, 1992.
VÁLYI, L.: Atom and Ion Sources. John Wiley and Sons Ltd (March 1, 1978).
ECKERTOVÁ, L.: Physics of Thin Films. Plenum Press, New York, 1986.
FELDMAN, L. C., MAYER, J. W.: Fundamentals of Surface and Thin Film Analysis. Elsevier Science Publishing Co., Inc., 1986.
RIVIERE, J. C.: Surface Analytical Techniques. Clarendon Press, Oxford, 1990.