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Ukončeno v akademickém roce 2022/2023

Thin Films

Type of study Bachelor
Language of instruction English
Code 9360-0500/02
Abbreviation TV
Course title Thin Films
Credits 4
Coordinating department CNT - Nanotechnology Centre
Course coordinator doc. Dr. Mgr. Kamil Postava

Osnova předmětu

Contents:
- Introduction to methods of thin film preparation and characterization.
- Optics of thin films - electromagnetic theory of light propagation in thin and thick layers, phenomena at interfaces, matrix description of isotropic and anisotropic layered media
- Optical multilayer filters - anti-reflection systems, bandpass filters,
thin-film beamsplitters, narrow-band pass Fabry-Perot filters.
- Electrical properties of thin films - conductivity of thin layers, transport
phenomena, thin films of semiconductors and dielectrics, semiconductors and semiconductor and metal interfaces.
- Application of thin layers in semiconductor industry and technology
ultra-high integration, measurement of electrical parameters of thin layers.
- Magnetic properties of thin films - ferromagnetic thin films,
magnetic anisotropy, applications in magnetic recording and sensors.

Povinná literatura

OHRING, M., The material science of thin films, Academic Press, 1992.
MACLEOD, H. A.: Thin-film optical filters, 2nd ed. Bristol, 1986;
YEH, P.: Optical waves in layered media, Willey, New York 1988;

Doporučená literatura

LUTH, H., Solid surfaces, interfaces and thin films, Springer, Berlin 2001.
AZZAM, R. M. A., BASHARA, N. M.: Ellipsometry and polarized light, North-Holland, Amsterdam, 1977;