The subject is oriented on characteristic of processes for preparation of individual types of micro- and nano-structural materials and materials that are used by the existing technologies in relation to micro-technologies, used materials and directions of development for the needs of qualified solution of problems connected with continuing miniaturisation of electronic systems and elements. It deals also with technologies for preparation of physically and chemical highly pure materials, basic processes and materials of contemporary micro-technology of semi-conducting materials and integrated circuits with very high integration, impact of geometric dimensions on properties of solid materials, mechanisms of non-equilibrium processes of formation of micro- and nano-structure, principles of selectivity and procedures of technological operations, synthesis, forming of micro- and nano-layers, processing of bulk materials, their characterisation, properties and applications in electronics. Lectures on theory of synthesis of micro- and nano-materials, molecular engineering, micro-technologies give an idea about technologies of next decades.