Příprava a charakterizace nanostruktur

Příprava a charakterizace nanostruktur
653-2243/01
čeština

Anotace

The course covers vacuum systems, principles of preparation of thin films by magnetron sputtering and chemical vapour deposition. It also deals with the preparation of nanostructures using direct-write laser lithography.

Povinná literatura

IKHMAYIES, Shadia Jamil (ed.). Advanced Nanomaterials. Springer Nature, 2022.
SLAVÍČEK, Pavel; ŠTĚPÁNOVÁ, Vlasta; KELAR, Jakub. Vakuová fyzika 1. 2016.
MATTOX, Donald M. Handbook of physical vapor deposition (PVD) processing. William Andrew, 2010.
HARIHARAN, P. Basics of holography. Cambridge: Cambridge University Press, 2002. ISBN 0-521-00200-1.
LEVINSON, Harry J. Principles of lithography. Fourth edition. Bellingham, Washington: SPIE Press, [2019]. ISBN 978-1-5106-2760-4.

Doporučená literatura

MWEMA, Fredrick Madaraka; JEN, Tien-Chien; ZHU, Lin. Thin film coatings: properties, deposition, and applications. CRC Press, 2022.

ABERLE, Armin G. Thin-film solar cells. Thin solid films, 2009, 517.17: 4706-4710.

SESHAN, Krishna; SCHEPIS, Dominic (ed.). Handbook of thin film deposition. William Andrew, 2018.

zpět na vyhledávání

Language of instruction	čeština
Code	653-2243
Abbreviation	PCHN
Course title	Příprava a charakterizace nanostruktur
Coordinating department	Department of Materials Engineering and Recycling
Course coordinator	Ing. Zuzana Gelnárová, Ph.D.