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Scanning probe microscopy and electron microscopy

Type of study Follow-up Master
Language of instruction Czech
Code 9360-0143/04
Abbreviation SPM+EM
Course title Scanning probe microscopy and electron microscopy
Credits 3
Coordinating department CNT - Nanotechnology Centre
Course coordinator doc. Ing. Vladimír Tomášek, CSc.

Subject syllabus

1. History of optical microscopy, optical microscopes, light imaging. Discovery of electrons, construction of the first electron microscope. Wavelength, accelerating voltage, resolution, calculation of resolution and magnification.
2. Basic types of electron microscopes, difference in scanning and transmission microscope design. Difference in sample preparation, image acquisition, real and virtual imaging, instrumentation of electron microscopes.
3. Vacuum systems of electron microscopes. Lighting system, types of electron sources. Termoemise, cold emission, emission current and probe current.
4. Imaging defects, chromatic defect, astigmatism. Depth of sharpness. Electromagnetic lenses.
5. Interaction of electrons with matter, precipitation types, secondary (SE) and backscattered electrons (BSE). SE and BSE detectors, phase (material) and topographic contrast, excitation volume. Charging the preparation and eliminating it.
6. Imaging in transmission electron microscopy - dark and light field, HAADF. Image analysis, size distribution of particles. Virtual electron microscopy.
7. ample preparation for scanning electron microscopy. Preparation of thin films, sputtering of metal, carbon. Instrumentation technique and aids for preparation of samples, principles of proper preparation. Artifacts.
8. Analytical electron microscope. Characteristic X-rays, types of transitions, continuous radiation. Conditions for obtaining a representative X-ray. spectra in elemental analysis. Energy and wave lenght dispersion X-ray analysis, types of detectors. Line analysis and mapping. Auger electrons and EELS.
9. Dual beam microscopes, ion beam utilization. Interaction of the ion beam with matter. Scanning transmission electron microscope. Working in low vacuum mode. Desktop electron microscopes.
10. Interconnection of electron microscopy with atomic force microscopy. Correlative microscopy. Combination of electron microscopy with other analytical techniques (Raman spectroscopy, mass spectroscopy).
11. Theoretical basics of scanning probe microscopy (SPM) methods. Division of SPM techniques. Basic design elements of microscopes.
12. Scanners and scanner errors, scanning tunneling microscopy (STM). STM measurement modes and their examples.
13. Basic principles of atomic force microscopy (AFM). Interaction of the tip with the sample surface. Detection of cantilever bending. Forces between tip and arm. Point spectroscopy. Force distance (FD) curves.
14. AFM basic measurement techniques. Basic 2D and 3D techniques - contact, semicontact and non-contact mode. Acquaintance with other AFM measuring modes - eg LFM, MFM, lithography, multipass techniques and more.

Literature

BONNELL, D. editor. Scanning Probe Microscopy and Spectroscopy, Theory, Techniques and Applications. Wiley-VCH, 2001.
YAO, Nan, WANG, Zhong Lin. Handbook of Microscopy for Nanotechnology. Springer US, 2005. ISBN 978-1-4020-8003-6 .
WATT, I., M.: The Principles and Practice of Electron Microscopy. Cambridge University Press,1997.

Advised literature

WILLIAMS D. B. Practical Analytical Electron Microscopy in Materials Science. Verlag Chemie International, 1984.
KRATOŠOVÁ, Gabriela, Kateřina DĚDKOVÁ, Ivo VÁVRA a Fedor ČIAMPOR. Investigation of nanoparticles in biological objects by electron microscopy techniques. In: Intracellular Delivery II: Fundamentals and Applications (Eds: Aleš Prokop, Y. Iwasaki, A. Harada), Springer Verlag, 2014.