Skip to main content
Skip header

ECTS Course Overview



Nanotechnology I - Thin Films

* Exchange students do not have to consider this information when selecting suitable courses for an exchange stay.

Course Unit Code9360-0129/02
Number of ECTS Credits Allocated4 ECTS credits
Type of Course Unit *Optional
Level of Course Unit *First Cycle
Year of Study *
Semester when the Course Unit is deliveredWinter Semester
Mode of DeliveryFace-to-face
Language of InstructionCzech, English
Prerequisites and Co-Requisites Course succeeds to compulsory courses of previous semester
Name of Lecturer(s)Personal IDName
POS40doc. Dr. Mgr. Kamil Postava
Summary
The main target of this subject is to introduce thin films as one-dimensional nanostructures. The lectures deals with technology of thin-film preparation, its characterization and description of optical, electrical, and magnetic properties of thin films. A stress is laid on summary of basic thin film applications. Students will be also informed about basic research directions at VSB-Technical University of Ostrava in the field of physics of thin films and nanostructures and available Bc. thesis.
Learning Outcomes of the Course Unit
The main target of this subject is to introduce thin films as one-dimensional nanostructures. The lectures deals with technology of thin-film preparation, its characterization and description of optical, electrical, and magnetic properties of thin films. A stress is laid on summary of basic thin film applications. Students will be also informed about basic research directions at VSB-Technical University of Ostrava in the field of physics of thin films and nanostructures and available Bc. thesis.
Course Contents
The lectures consists of:
1. Introduction to thin films as one-dimensional nanostructures
2. Vacuum systems used for preparation of thin films, requirements of reduced pressure, vacuum technology
3. Physical vapor deposition, evaporation, sputtering
4. Chemical methods for thin-film deposition, chemical vapor deposition, electrodeposition, atomic layer deposition
5. Growth mechanism of thin films, growth of self-assembled nanostructures, epitaxy
6. Summary of methods for determination of thickness, composition, and structure of thin films
7. Optics of thin films, introduction to interference phenomena
8. Application of optical thin films, , interference filters, antrireflection coating, 1D photonic crystals
9. Electric properties of thin films, measurement of thin film conductivity
10. Application of thin films in microelectronics, effects o interfaces
11. Introduction to magnetic properties of thin films
12. Application of magnetic thin films, magnetic recording and data storage
Recommended or Required Reading
Required Reading:
OHRING, M., The material science of thin films, Academic Press, 1992.
MACLEOD, H. A.: Thin-film optical filters, 2nd ed. Bristol, 1986.
YEH, P.: Optical waves in layered media, Willey, New York 1988.
OHRING, M., The material science of thin films, Academic Press, 1992.
MACLEOD, H. A.: Thin-film optical filters, 2nd ed. Bristol, 1986.
YEH, P.: Optical waves in layered media, Willey, New York 1988.
ECKERTOVÁ, L.: Fyzika tenkých vrstev, Populární přednášky o fyzice, sv. 21; KŘEPELKA, J.: Optika tenkých vrstev, UP Olomouc, 1993.
Recommended Reading:
LUTH, H., Solid surfaces, interfaces and thin films, Springer, Berlin 2001.
AZZAM, R. M. A., BASHARA, N. M.: Ellipsometry and polarized light, North-Holland, Amsterdam, 1977.
LUTH, H., Solid surfaces, interfaces and thin films, Springer, Berlin 2001.
AZZAM, R. M. A., BASHARA, N. M.: Ellipsometry and polarized light, North-Holland, Amsterdam, 1977.
Planned learning activities and teaching methods
Lectures, Tutorials
Assesment methods and criteria
Tasks are not Defined